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Build Your Online Product Catalogs?
| Product Name: |
Protech PECVD system for thin film coating
|
| Supply Ability: |
1 set |
| Related proudcts |
pecvd, rf power, cvd system, |
| Specifications |
Dia. 80x 440x1000mmLength |
| Price Term: |
T/T, Western Union, Paypal |
| Port of loading: |
Zhengzhou |
| Minimum Order |
1 set |
| Unit Price: |
36700USD/set |
|
Name Item Data
1) RF power Max. power 500W
RF frequency 13.56MHz
Reflection power 200W
RF power output port 50Ώ
Cooling 208~240VAC
2) Preheating furnace Max. temperature 1200C
Working temperature 0~1150C
Temperature control Digital programmable and PID automatic control
Temperature accuracy +/-1.C
Working chamber Dia. 80x 440x1000mmLength
Power supply 208V~240V, 50/60Hz
3)Anti-corrosive pressure gauge Brand Inficon
Type Anti-corrosive, gas-type independent
high accuracy and reproducibility at atmosphere
Easy to change plug and play sensor element
4) Vacuum pump set Max. Vacuum pressure 10E-2Torr
Type Heavy duty rotary vane vacuum pump
Model PT-RT-4
5) Gas mixer tank Four precise MFC with digital display to control the gas flow automatically
MFC1 Flow range from 0~100sccm
MFC2 Flow range from 0~200sccm
MFC3 Flow range from 0~500sccm
MFC4 Flow range from 0~1000sccm
The flow range are optional according to your concrete working condition
Needle valve and connect tubes are also included |
| Company: |
Zhengzhou Protech Mechanical Equipment Co,. Ltd.
|
| Contact: |
Ms. Jessica Zhang |
| Address: |
No.11 Zhengshang Road, Zhengzhou City, China |
| Postcode: |
450000 |
| Tel: |
008637156763132 |
| Fax: |
008637167103035 |
| E-mail: |
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